The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2016

Filed:

Oct. 18, 2013
Applicant:

Daishinku Corporation, Kakogawa-shi, JP;

Inventors:

Naoki Kohda, Kakogawa, JP;

Hiroki Yoshioka, Kakogawa, JP;

Assignee:

DAISHINKU CORPORATION, Kakogawa-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/332 (2013.01); H01L 41/23 (2013.01); H03H 3/02 (2006.01); H01L 41/25 (2013.01); H01L 41/29 (2013.01); H01L 41/33 (2013.01); H01L 31/18 (2006.01); H03H 9/05 (2006.01); H01L 23/373 (2006.01); H03H 9/10 (2006.01); H03H 9/19 (2006.01); C23C 8/40 (2006.01); C23C 12/00 (2006.01); H03H 3/04 (2006.01);
U.S. Cl.
CPC ...
H01L 41/332 (2013.01); H01L 23/3731 (2013.01); H01L 23/3732 (2013.01); H01L 23/3733 (2013.01); H01L 31/18 (2013.01); H01L 31/1804 (2013.01); H01L 41/23 (2013.01); H01L 41/25 (2013.01); H01L 41/29 (2013.01); H01L 41/33 (2013.01); H03H 3/02 (2013.01); H03H 9/0547 (2013.01); H03H 9/0552 (2013.01); H03H 9/1035 (2013.01); H03H 9/19 (2013.01); B01D 2325/02 (2013.01); C23C 8/40 (2013.01); C23C 12/00 (2013.01); H03H 2003/045 (2013.01); H03H 2003/0457 (2013.01); Y10T 29/42 (2015.01);
Abstract

A manufacturing method for a piezoelectric resonator device includes sequential steps of: (i) laminating a metal film constituted by at least two types of metals on at least one of a substrate of a joining region of a piezoelectric resonator plate, a substrate of a region of an upper lid member, and a substrate of a region of a lower lid member; (ii) promoting metal diffusion inside the metal film by heat processing; and (iii) roughening a surface of the substrate of the at least one of the piezoelectric resonator plate, the upper lid member, and the lower lid member by performing wet etching with an etchant caused to penetrate into the metal film and thereby forming a large number of micropores in the surface of the substrate of the at least one of the piezoelectric resonator plate, the upper lid member, and the lower lid member.


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