The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2016

Filed:

Jul. 29, 2015
Applicant:

Nano and Advanced Materials Institute Limited, Hong Kong, HK;

Inventors:

Caiming Sun, Hong Kong, HK;

Chun Zhao, Hong Kong, HK;

Ka Chon Wong, Hong Kong, HK;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/51 (2006.01); H01L 29/00 (2006.01); H01L 27/11 (2006.01); H01L 29/423 (2006.01); H01L 27/115 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42348 (2013.01); H01L 21/28282 (2013.01); H01L 27/11568 (2013.01); H01L 29/513 (2013.01);
Abstract

Si/SiOcore/shell nanostructures with sizes below 30 nm as trapping points in UV curable hybrid organic-inorganic gate dielectrics are presented in order to investigate printable nano floating gate transistors. Not only does the novelty of this invention comes from fabricating high-quality hybrid organic/inorganic gate dielectric layer by Sol-Gel process at low temperature but also incorporating the monolayer of high-density of Si nanoparticles (NPs) without obvious interface defects and keeping the quality of dielectric layers. Fixed-charge trapping defects are successfully removed from hybrid dielectrics by UV curing together with low temperature thermal curing and mobile charges solely related to Si/SiOcore/shell nanostructures on charge trapping layer clearly demonstrate memory effects on printable device. Thin/uniform SiOshell on each Si NP functions as tunneling layer of flash memory devices, significantly simplifying the fabrication of printable nano floating gate memory device.


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