The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2016
Filed:
Oct. 18, 2013
Applicant:
Sandia Corporation, Albuquerque, NM (US);
Inventors:
Thomas D. Perroud, San Jose, CA (US);
Kamlesh D. Patel, Dublin, CA (US);
Robert J. Meagher, Mountain House, CA (US);
Assignee:
Sandia Corporation, Albuquerque, NM (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01L 3/00 (2006.01); B81B 1/00 (2006.01); C23F 1/02 (2006.01); G01N 33/50 (2006.01); B01F 3/08 (2006.01); B01F 5/04 (2006.01); B01F 13/00 (2006.01); F15D 1/00 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
G01N 33/5005 (2013.01); B01F 3/0807 (2013.01); B01F 5/0471 (2013.01); B01F 13/0059 (2013.01); B01L 3/502707 (2013.01); B01L 3/502761 (2013.01); B81C 1/00087 (2013.01); B81C 1/00404 (2013.01); B01L 3/502753 (2013.01); B01L 3/502776 (2013.01); B01L 3/502784 (2013.01); B01L 2200/0668 (2013.01); B01L 2300/0816 (2013.01); B01L 2300/0864 (2013.01); B01L 2400/0688 (2013.01); B81B 2201/058 (2013.01); B81C 1/00047 (2013.01); B81C 1/00119 (2013.01); B81C 2201/0133 (2013.01); B81C 2201/0142 (2013.01); Y10T 137/9464 (2015.04); Y10T 428/24479 (2015.01);
Abstract
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2× a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.