The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2016
Filed:
Nov. 26, 2012
Applicant:
Hysitron Incorporated, Minneapolis, MN (US);
Inventors:
Yunje Oh, Medina, MN (US);
Syed Amanula Syed Asif, Bloomington, MN (US);
Oden Warren, New Brighton, MN (US);
Assignee:
Hysitron, Inc., Eden Prairie, MN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 3/48 (2006.01); G01N 3/40 (2006.01); G01Q 60/36 (2010.01); G01N 3/42 (2006.01); G01N 19/00 (2006.01); G01B 7/34 (2006.01);
U.S. Cl.
CPC ...
G01N 3/40 (2013.01); G01N 3/42 (2013.01); G01Q 60/366 (2013.01); G01B 7/34 (2013.01); G01N 19/00 (2013.01); G01N 2203/0051 (2013.01); G01N 2203/0286 (2013.01); G01N 2203/0617 (2013.01); Y10S 977/956 (2013.01);
Abstract
A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe.