The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2016
Filed:
Feb. 01, 2013
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Masami Maeda, Suwa, JP;
Toshioki Shimojima, Suwa, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F25B 5/00 (2006.01); F28F 27/00 (2006.01); H01L 21/67 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
F28F 27/00 (2013.01); G01R 31/2867 (2013.01); G01R 31/2874 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); G01R 31/2868 (2013.01);
Abstract
A handler includes first and second cooling channels, and first and second supply channels. The first and second cooling channels correspond to housing pockets that are respectively heated by heaters. A first throttle valve controls the flow of refrigerant such that the amount of refrigerant flowing through the second cooling channel is larger than the amount of the refrigerant flowing through the first cooling channel. Temperature sensors detect the temperature of the respective housing pockets, and a control device controls the valve and the heaters so that a target temperature is maintained.