The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2016

Filed:

Jun. 30, 2011
Applicants:

Brian D. Homeijer, Corvallis, OR (US);

Robert Newton Bicknell, Corvallis, OR (US);

Inventors:

Brian D. Homeijer, Corvallis, OR (US);

Robert Newton Bicknell, Corvallis, OR (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 25/00 (2006.01); G01P 21/00 (2006.01); G01V 13/00 (2006.01); B81B 3/00 (2006.01); G01V 1/16 (2006.01); G01H 11/00 (2006.01); B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
B81B 3/0064 (2013.01); B81C 99/003 (2013.01); G01H 11/00 (2013.01); G01V 1/162 (2013.01); G01V 13/00 (2013.01); B81B 2201/0235 (2013.01);
Abstract

A micro electromechanical systems (MEMS) sensor is excited. The response of the MEMS sensor is measured. The MEMS sensor is calibrated.


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