The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 26, 2016

Filed:

Sep. 05, 2011
Applicants:

Satoshi Mizukami, Kanagawa, JP;

Yoshikazu Akiyama, Kanagawa, JP;

Masaru Shinkai, Kanagawa, JP;

Osamu Machida, Kanagawa, JP;

Inventors:

Satoshi Mizukami, Kanagawa, JP;

Yoshikazu Akiyama, Kanagawa, JP;

Masaru Shinkai, Kanagawa, JP;

Osamu Machida, Kanagawa, JP;

Assignee:

Ricoh Company, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/09 (2006.01); H01L 41/08 (2006.01); B41J 2/045 (2006.01); B41J 2/14 (2006.01); B41J 2/16 (2006.01); H01L 27/20 (2006.01); H01L 41/29 (2013.01);
U.S. Cl.
CPC ...
H01L 41/0973 (2013.01); B41J 2/045 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1642 (2013.01); B41J 2/1645 (2013.01); B41J 2/1646 (2013.01); H01L 27/20 (2013.01); H01L 41/0477 (2013.01); H01L 41/0478 (2013.01); H01L 41/0805 (2013.01); H01L 41/29 (2013.01); B41J 2002/1425 (2013.01); B41J 2002/14491 (2013.01);
Abstract

A manufacturing method of an electromechanical transducing device includes forming a vibration plate on a substrate; forming a first electrode made of a metal on the vibration plate; forming a second electrode made of an electrically conductive oxide on the first electrode; coating a surface modification material and carrying out surface modification of only the first electrode; forming an electromechanical transducing film on the second electrode; and forming a third electrode made of an electrically conductive oxide on the electromechanical transducing film.


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