The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 26, 2016

Filed:

Feb. 09, 2012
Applicants:

Jung Jae Park, Seoul, KR;

DO Yeon Kim, Seoul, KR;

Jong Gun Lee, Seoul, KR;

Min Wook Lee, Seoul, KR;

Suk Goo Yoon, Seoul, KR;

Inventors:

Jung Jae Park, Seoul, KR;

Do Yeon Kim, Seoul, KR;

Jong Gun Lee, Seoul, KR;

Min Wook Lee, Seoul, KR;

Suk Goo Yoon, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); H01L 31/032 (2006.01); H01L 31/0749 (2012.01); H01L 31/20 (2006.01); C23C 24/04 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); C23C 24/045 (2013.01); H01L 31/0322 (2013.01); H01L 31/0749 (2013.01); H01L 31/206 (2013.01); H01L 21/0259 (2013.01); H01L 21/02568 (2013.01); H01L 21/02628 (2013.01); Y02E 10/541 (2013.01); Y02P 70/521 (2015.11);
Abstract

The present invention relates to an apparatus for manufacturing an inorganic thin-film solar cell, the apparatus including: a substrate stage which is mounted in a chamber and in which a solar cell substrate is disposed; and an inorganic powder supply unit including a nozzle configured to discharge an inorganic powder aerosol containing an inorganic powder onto the substrate stage in a supersonic flow so as to form a solar cell layer on the solar cell substrate, and an inorganic powder supply portion configured to supply the inorganic powder aerosol to the nozzle.


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