The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 26, 2016

Filed:

Sep. 23, 2011
Applicants:

Laurent Duraffourg, Voiron, FR;

Philippe Andreucci, Moirans, FR;

Inventors:

Laurent Duraffourg, Voiron, FR;

Philippe Andreucci, Moirans, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/00 (2006.01); G01H 13/00 (2006.01); G01K 11/26 (2006.01); G01J 5/28 (2006.01); G01J 5/02 (2006.01); G01J 5/40 (2006.01); G01J 5/44 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
G01J 5/28 (2013.01); G01J 5/02 (2013.01); G01J 5/023 (2013.01); G01J 5/40 (2013.01); G01J 5/44 (2013.01); H01L 31/18 (2013.01);
Abstract

A bolometer including: at least one electromechanical microsystem or nanosystem, the microsystem or nanosystem including a support and a mobile mass hung from beams above the support, the mobile mass forming an absorber of optical flux; actuation electrodes configured to set the mobile mass in vibration and arranged laterally relative to the mobile mass; and detection electrodes to detect variation in vibration frequency of the mobile mass arranged laterally relative to the mobile mass.


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