The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2016
Filed:
Jul. 09, 2012
Applicants:
Stefan Reber, Gundelfingen, DE;
Norbert Schillinger, Ihringen, DE;
David Pocza, Freiburg, DE;
Martin Arnold, Gundelfingen, DE;
Inventors:
Stefan Reber, Gundelfingen, DE;
Norbert Schillinger, Ihringen, DE;
David Pocza, Freiburg, DE;
Martin Arnold, Gundelfingen, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/54 (2006.01); C23C 16/458 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/458 (2013.01); C23C 16/4401 (2013.01); C23C 16/4587 (2013.01); C23C 16/54 (2013.01);
Abstract
The invention relates to a method for continuous coating of substrates, in which the substrates are transported continuously through a deposition chamber and, at the same time, measures are adopted for reducing parasitic deposits as well as possible. Likewise, the invention relates to a corresponding device for continuous coating of substrates.