logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9399816 B1

PDFFull Text
Expired
Date of Patent:
Jul. 26, 2016

Filed:

Oct. 13, 2011

Refurbishing copper and indium containing alloy sputter targets and use of such targets in making copper and indium-based films

Applicants:

Jennifer Gerbi, Midland, MI (US);

Robert Nilsson, Midland, MI (US);

Inventors:

Jennifer Gerbi, Midland, MI (US);

Robert Nilsson, Midland, MI (US);

Assignee:

Dow Global Technologies LLC, Midland, MI (US);

Attorney:
Primary Examiner:

Jessee Roe

Int. Cl.
CPC ...
B22F 3/04 (2006.01); C23C 14/34 (2006.01); C23C 14/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); C23C 14/0623 (2013.01); B22F 2999/00 (2013.01);
Abstract

This invention relates to a method of refurbishing sputter targets comprising: providing a sputter target comprising a temperature sensitive alloy, having regions depleted of material; providing a powder having a first phase comprising the desired temperature sensitive alloy onto the surface; and pressing the powder onto the surface to form a refurbished target, at temperatures lower than that which would damage the temperature sensitive alloy.

Find Patent Forward Citations

Gerbi, Jennifer. (2016). Refurbishing copper and indium containing alloy sputter targets and use of such targets in making copper and indium-based films (U.S. Patent No. 9399816). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9399816

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…