IDiyas

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9399815 B1

PDFFull Text
Date of Patent:
Jul. 26, 2016

Filed:

Sep. 27, 2011

Sintered oxide material, method for manufacturing same, sputtering target, oxide transparent electrically conductive film, method for manufacturing same, and solar cell

Applicants:

Hideto Kuramochi, Ayase, JP;

Keitaro Matsumaru, Ayase, JP;

Ryo Akiike, Ayase, JP;

Kentaro Utsumi, Ayase, JP;

Tetsuo Shibutami, Ayase, JP;

Inventors:

Hideto Kuramochi, Ayase, JP;

Keitaro Matsumaru, Ayase, JP;

Ryo Akiike, Ayase, JP;

Kentaro Utsumi, Ayase, JP;

Tetsuo Shibutami, Ayase, JP;

Assignee:

TOSOH CORPORATION, Yamaguchi, JP;

Attorney:

Greenblum & Bernstein, P.L.C.

Primary Examiner:

Tamir Ayad

Assistant Examiner:

Eric R Smith

Int. Cl.
CPC ...
C23C 14/08 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); C01G 19/00 (2006.01); C04B 35/01 (2006.01); C04B 35/457 (2006.01); H01B 1/08 (2006.01); H01L 31/0224 (2006.01); H01L 31/0749 (2012.01); H01L 31/18 (2006.01); C04B 35/626 (2006.01); C04B 35/645 (2006.01);
U.S. Cl.
CPC ...
C23C 14/08 (2013.01); C01G 19/006 (2013.01); C04B 35/01 (2013.01); C04B 35/457 (2013.01); C04B 35/62635 (2013.01); C04B 35/62675 (2013.01); C04B 35/62685 (2013.01); C04B 35/645 (2013.01); C23C 14/086 (2013.01); C23C 14/3407 (2013.01); C23C 14/3414 (2013.01); C23C 14/35 (2013.01); H01B 1/08 (2013.01); H01L 31/022425 (2013.01); H01L 31/022466 (2013.01); H01L 31/022475 (2013.01); H01L 31/0749 (2013.01); H01L 31/1884 (2013.01); C01P 2002/34 (2013.01); C01P 2002/50 (2013.01); C01P 2004/62 (2013.01); C01P 2006/40 (2013.01); C01P 2006/60 (2013.01); C04B 2235/3213 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/3293 (2013.01); C04B 2235/5409 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/604 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/6565 (2013.01); C04B 2235/6585 (2013.01); C04B 2235/6586 (2013.01); C04B 2235/76 (2013.01); C04B 2235/768 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01); C04B 2235/80 (2013.01); C04B 2235/963 (2013.01); Y02E 10/541 (2013.01); Y02P 70/521 (2015.11);
Abstract

The invention provides an oxide sintered compactcomposed of a crystal phase which consists of a bixbite-type oxide phase and a perovskite-type oxide phase, or a bixbite-type oxide phase, the crystal phase having indium, tin, strontium and oxygen as the constituent elements, and the indium, the tin and the strontium contents satisfying formulas (1) and (2) in terms of atomic ratio, as well as a sputtering target. There are further provided an oxide transparent conductive film formed using the sputtering target, and a solar cell.Sn/(In+Sn+Sr)=0.01-0.11  (1)Sr/(In+Sn+Sr)=0.0005-0.004  (2)[In formulas (1) and (2), In, Sn and Sr represent indium, tin and strontium contents (atomic percent), respectively.]

Find Patent Forward Citations

Loading…