The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2016
Filed:
Jan. 27, 2012
Bernd Burchard, Essen, DE;
Michael Doelle, Munich, DE;
Bernd Burchard, Essen, DE;
Michael Doelle, Munich, DE;
Elmos Semiconductor AG, Dortmund, DE;
Abstract
The microelectromechanical component has a semiconductor substrate (), which has a cavity () formed in the semiconductor substrate. The cavity is covered by a reversibly deformable membrane (). A sensor () for detecting a deformation of the membrane () is formed within the region of the membrane (). A test actuator () for deforming the membrane () for testing purposes is also arranged within the region of the membrane (). Finally, the microelectromechanical component has an evaluation and activation unit () connected to the sensor () and the test actuator () for activating the test actuator () in order to deform the membrane () as a test and for evaluating a measurement signal of the sensor () as a sensor detection of a deformation of the membrane () as a result of the activation of the test actuator ().