The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 19, 2016

Filed:

Sep. 26, 2014
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Daisuke Morita, Tokyo, JP;

Hiroyuki Kawahara, Tokyo, JP;

Shinji Kimura, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01S 5/0625 (2006.01); H01S 5/343 (2006.01); H01S 5/40 (2006.01); H01J 37/305 (2006.01); H01S 5/026 (2006.01); H01S 5/00 (2006.01); H01S 5/12 (2006.01); H01S 5/30 (2006.01);
U.S. Cl.
CPC ...
H01S 5/06256 (2013.01); H01J 37/3053 (2013.01); H01J 37/3056 (2013.01); H01S 5/0265 (2013.01); H01S 5/34313 (2013.01); H01S 5/4087 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/30472 (2013.01); H01J 2237/3174 (2013.01); H01S 5/0014 (2013.01); H01S 5/12 (2013.01); H01S 5/3054 (2013.01); H01S 5/34306 (2013.01); H01S 2301/173 (2013.01);
Abstract

A method for manufacturing a semiconductor device includes forming a lower light confinement layer on a substrate, a light absorption layer on the lower light confinement layer, and an upper light confinement layer on the light absorption layer; and removing parts of these layers to form an optical modulator, forming a laser section having a diffraction grating in a portion of the substrate where the optical modulator is not present, forming a diffusion constraining layer, which constrains diffusion of a dopant, on the upper light confinement layer, and forming a contact layer on the laser section and the diffusion constraining layer. The same dopant is present in the contact layer and the upper light confinement layer.


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