The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Nov. 25, 2011
Applicants:
Masami Mesuda, Tokyo, JP;
Hideto Kuramochi, Kanagawa, JP;
Hitoshi Iigusa, Kanagawa, JP;
Kenji Omi, Kanagawa, JP;
Tetsuo Shibutami, Kanagawa, JP;
Inventors:
Masami Mesuda, Tokyo, JP;
Hideto Kuramochi, Kanagawa, JP;
Hitoshi Iigusa, Kanagawa, JP;
Kenji Omi, Kanagawa, JP;
Tetsuo Shibutami, Kanagawa, JP;
Assignee:
TOSOH CORPORATION, Yamaguchi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B 1/08 (2006.01); C04B 35/00 (2006.01); C04B 35/453 (2006.01); C04B 35/645 (2006.01); H01L 21/02 (2006.01); C23C 14/34 (2006.01); C04B 37/02 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
H01B 1/08 (2013.01); C04B 35/453 (2013.01); C04B 35/645 (2013.01); C04B 37/026 (2013.01); C23C 14/086 (2013.01); C23C 14/3407 (2013.01); C23C 14/3414 (2013.01); H01L 21/02554 (2013.01); H01L 21/02581 (2013.01); H01L 21/02631 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3246 (2013.01); C04B 2235/3284 (2013.01); C04B 2235/404 (2013.01); C04B 2235/5409 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/604 (2013.01); C04B 2235/608 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/6565 (2013.01); C04B 2235/6586 (2013.01); C04B 2235/725 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01); C04B 2237/12 (2013.01); C04B 2237/34 (2013.01); C04B 2237/407 (2013.01);
Abstract
There is provided a zinc oxide sintered compact with a zirconium content of 10 to 1000 ppm, and a sputtering target containing the zinc oxide sintered compact. There is also provided a zinc oxide thin-film having a zirconium content of 10 to 2000 ppm and a resistivity of 10 Ω·cm or greater.