The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Sep. 30, 2014
Applicant:
Pixtronix, Inc., San Diego, CA (US);
Inventor:
Teruo Sasagawa, Los Gatos, CA (US);
Assignee:
Pixtronix, Inc., San Diego, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G02B 26/02 (2006.01); B81C 1/00 (2006.01); G09G 5/10 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G02B 26/02 (2013.01); B81C 1/0015 (2013.01); B81C 1/00952 (2013.01); G02B 26/0841 (2013.01); G09G 5/10 (2013.01); B81C 2201/013 (2013.01); B81C 2201/016 (2013.01); G02B 26/0858 (2013.01); G09G 2300/04 (2013.01);
Abstract
This disclosure provides systems, methods and apparatus including devices that include a layer of passivation material covering at least a portion of an exterior surface of a thin film component within a microelectomechanical device. The thin film component may include an electrically conductive layer that connects via an anchor to a conductive surface on a substrate. The disclosure further provides processes for providing a layer of passivation material on an exterior surface of a thin film component and for electrically connecting that thin film component to a conductive surface on a substrate.