The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 19, 2016

Filed:

Jun. 19, 2015
Applicant:

Shimadzu Corporation, Kyoto-shi, Kyoto, JP;

Inventor:

Masahiro Ohta, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01); G01Q 60/30 (2010.01); G01Q 20/00 (2010.01); G01Q 10/00 (2010.01); B82Y 25/00 (2011.01); B82Y 35/00 (2011.01);
U.S. Cl.
CPC ...
G01Q 20/00 (2013.01); B82Y 25/00 (2013.01); B82Y 35/00 (2013.01); G01Q 10/00 (2013.01);
Abstract

A scanning probe microscopes including an imaging device (optical microscope) which images the cantilever, a device is provided which estimates the resonance frequency of the cantilever from the cantilever image imaged by the imaging device, as a result of which, even when information on the cantilever is unknown, the cantilever is actually excited to perform measurement of resonance frequency within a specified frequency range centered on the estimated resonance frequency, thereby enabling measurement of resonance frequency within an appropriate frequency range and making it possible to avoid obtaining an incorrect resonance frequency and to eliminate the waste of performing resonance frequency measurements while changing the frequency range settings in trial-and-error fashion.


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