The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Jul. 03, 2012
Johann Hinken, Magdeburg, DE;
Johann Hinken, Magdeburg, DE;
Other;
Abstract
Provided herein is a device for measuring a thickness of a dielectric layer on a base substrate. The device is provided with a cylindrical resonant cavity having a circular cylindrical wall and a plane wall on one end thereof, wherein the opposite end is open to be placed upon the dielectric layer on the substrate to form a wall of the resonant cavity on the opposite end; an antenna located within the resonant cavity and adapted to excite an electromagnetic field in the resonant cavity that is approximately zero in the dielectric layer; a reflection meter connected to the antenna and adapted to measure the resonant frequency of the resonant cavity; and a processor connected to the reflection meter. Also provided herein is a method for measuring a thickness of a dielectric layer on a base substrate having a curved surface.