The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Jun. 19, 2013
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Michael P. Karazim, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A21B 2/00 (2006.01); F26B 3/30 (2006.01); F16C 19/14 (2006.01); F16C 32/06 (2006.01); H02K 11/00 (2016.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
F16C 19/14 (2013.01); F16C 32/0618 (2013.01); F16C 32/0696 (2013.01); H01L 21/67115 (2013.01); H01L 21/68785 (2013.01); H01L 21/68792 (2013.01); H02K 11/0015 (2013.01);
Abstract
Embodiments of the present invention generally relate to a rotation device in an RTP chamber. The rotation device includes a cylindrical inner race, a plurality of thrust bearings and a plurality of radial bearings. During operation, the bearings create a gas cushion preventing the rotating parts from contacting the stationary parts.