The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Feb. 09, 2012
Applicants:
Hidenori Katsumura, Hyogo, JP;
Hiroshi Kagata, Osaka, JP;
Inventors:
Hidenori Katsumura, Hyogo, JP;
Hiroshi Kagata, Osaka, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/053 (2006.01); H01L 41/319 (2013.01); H01L 41/08 (2006.01); C23C 8/18 (2006.01); C23C 24/10 (2006.01); C23C 28/00 (2006.01); H01L 41/187 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H01L 41/053 (2013.01); C23C 8/18 (2013.01); C23C 24/10 (2013.01); C23C 24/106 (2013.01); C23C 28/321 (2013.01); C23C 28/345 (2013.01); H01L 41/0815 (2013.01); H01L 41/319 (2013.01); H01L 41/094 (2013.01); H01L 41/1876 (2013.01);
Abstract
A piezoelectric element includes a metal substrate, an alumina layer, a lower electrode, a piezoelectric layer, and an upper electrode. The metal substrate includes iron as a main component and includes at least aluminum and chromium. The alumina layer is formed on the metal substrate, and the lower electrode is formed on the alumina layer. The piezoelectric layer is formed on the lower electrode, and the upper electrode is formed on the piezoelectric layer. The alumina layer is mainly formed of particles in a γ-alumina phase.