The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Aug. 05, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
Tadashi Sawayama, Machida, JP;
Takashi Usui, Ashigarakami-gun, JP;
Akihiro Kawano, Kawasaki, JP;
Hiroaki Naruse, Yokohama, JP;
Sho Suzuki, Yokohama, JP;
Takehito Okabe, Atsugi, JP;
Masatsugu Itahashi, Yokohama, JP;
Daisuke Uki, Atsugi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A substrate includes a first region having photoelectric conversion portions and a second region having an element included in a signal processing circuit. An insulator including first and second parts respectively arranged on the first and second regions is formed on the substrate. Openings are formed in the insulator and respectively superposed on the photoelectric conversion portions. A first member is formed in the openings and on the second part of the insulator after forming the openings. At least a portion of the first member arranged on the second region is removed. The first member is planarized after removing at least the portion of the first member. A second insulator is formed on the first and second regions after planarizing the first member. A through-hole is formed in a part of the second insulator. No planarization with grinding is performed after forming the second insulator and before forming the through-hole.