The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Aug. 19, 2015
Applicant:
Ngk Insulators, Ltd., Aichi-prefecture, JP;
Inventors:
Tatsuro Takagaki, Nagoya, JP;
Yasunori Iwasaki, Kitanagoya, JP;
Sugio Miyazawa, Kasugai, JP;
Akiyoshi Ide, Kasugai, JP;
Hirokazu Nakanishi, Nagoya, JP;
Assignee:
NGK INSULATORS, LTD., Aichi-prefecture, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 29/16 (2006.01); C30B 29/06 (2006.01); C04B 35/115 (2006.01); C04B 35/111 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/683 (2013.01); C04B 35/111 (2013.01); C04B 35/115 (2013.01); C30B 29/06 (2013.01); H01L 27/12 (2013.01); H01L 29/16 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/5409 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/6023 (2013.01); C04B 2235/6025 (2013.01); C04B 2235/612 (2013.01); C04B 2235/6582 (2013.01); C04B 2235/661 (2013.01); C04B 2235/662 (2013.01); C04B 2235/945 (2013.01); C04B 2235/963 (2013.01); Y10T 428/21 (2015.01); Y10T 428/219 (2015.01); Y10T 428/24777 (2015.01);
Abstract
In a handle substrate for a composite wafer for a semiconductor, particles from the wafer with a notch formed therein are reduced. The handle substrateA orB for the composite wafer for the semiconductor is formed of a polycrystalline ceramic sintered body, and includes a notchA orB in its outer peripheral portion. The notch is formed with an as-sintered surface.