The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
May. 21, 2014
Applicant:
Kabushiki Kaisha Yaskawa Denki, Kitakyushu-shi, JP;
Inventor:
Yoshiki Kimura, Kitakyushu, JP;
Assignee:
KABUSHIKI KAISHA YASKAWA DENKI, Kitakyushu-Shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/677 (2006.01); B25J 13/08 (2006.01); H01L 21/687 (2006.01); B25J 9/04 (2006.01); H01L 21/67 (2006.01); B25J 9/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67766 (2013.01); B25J 9/042 (2013.01); B25J 9/1679 (2013.01); B25J 13/08 (2013.01); H01L 21/67265 (2013.01); H01L 21/68707 (2013.01); G05B 2219/40087 (2013.01); G05B 2219/45031 (2013.01); Y10S 901/02 (2013.01); Y10S 901/46 (2013.01);
Abstract
A substrate transfer robot includes a hand and a controller. The hand includes at least one detector configured to detect an arrangement state of a substrate in a substrate storage. The controller is configured to control the at least one detector to detect the arrangement state of the substrate in the substrate storage with the hand inclined in plan view toward a rotation center of the substrate transfer robot relative to a substrate storage center line. The substrate storage center line is in a direction perpendicular to a front surface of the substrate storage.