The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Mar. 04, 2015
Applicant:
Daihen Corporation, Osaka-shi, Osaka, JP;
Inventors:
Assignee:
DAIHEN Corporation, Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); G01N 21/9501 (2013.01); H01L 21/67288 (2013.01); H01L 21/67748 (2013.01); G01N 2021/9513 (2013.01); Y10S 901/47 (2013.01);
Abstract
A substrate damage detection device is configured to be mounted to a substrate transfer robot provided with a slidably-movable substrate support. The substrate damage detection device includes an image obtainer and a damage detector. The image obtainer, such as a camera, is configured to obtain an image of the periphery of a substrate placed on the substrate support of the transfer robot. The damage detector is configured to detect damage made to the substrate by using the image of the periphery obtained by the image obtainer.