The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Oct. 22, 2014
Xinjia Lin, Beijing, CN;
Qi Hao, Beijing, CN;
Jinwei Dong, Beijing, CN;
BEIJING SEVENSTAR ELECTRONICS CO., LTD., Beijing, CN;
Abstract
A loading and unloading device and method for a quartz reaction tube of a semiconductor diffusion equipment are provided; the loading and unloading device is used in combination with a lifting device of the quartz reaction tube; the lifting device has an interface flange that can be connected to the reaction tube. The loading and unloading device includes a translation drive structure, a linear guide rail, a bracket, and an auxiliary support structure to detachably fix the quartz reaction tube. During the loading procedure, the auxiliary support structure is mounted on the bracket; the front end of the translation drive structure is docked with the doorframes of the semiconductor diffusion equipment through a fixing structure, and the quartz reaction tube is docked with the interface flange of the lifting device by horizontally moving the bracket along the linear guide rail.