Substrate processing apparatus, substrate processing system, control method for substrate processing apparatus and storage medium

Abstract

A substrate processing apparatus includes a plurality of functional sectionsandeach of which is selectively set in an operating state where an assigned processing thereof is executable on a substrate and a standby state where an energy consumption amount is less than in the operating state, and an apparatus controllerwhich controls a state of each functional sectionbetween the operating state and the standby state and causes the functional section in charge of the assigned processing corresponding to a recipe to be set in the operating state and perform the assigned processing in executing the recipe specifying a processing procedure on the substrate. If an execution planned recipe, which is the recipe planned to be executed later, is given, the apparatus controllerspecifies the functional section capable of being in charge of the assigned processing corresponding to the execution planned recipe out of the plurality of functional sectionsandand obtains a resource consumption amount necessary to recover the specified functional section specified by the specifying operation to the operating state.