The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Feb. 21, 2014
Nikon Corporation, Chiyoda-ku, JP;
Yoshihiko Suzuki, Funabashi, JP;
Nikon Corporation, Tokyo, JP;
Abstract
Provided is a spatial light modulation element comprising a substrate; a reflecting mirror that moves from an initial position relative to the substrate; an elastic member that exerts an elastic force in a direction causing the reflecting mirror to return to the original position; a support body that supports the elastic member; and an elastic support member that elastically supports the support body relative to the substrate. In the spatial light modulation element, the support body may be supported at a distance from a surface of the substrate. The spatial light modulation element may further comprise a connecting portion that connects the support body to the substrate such that the support body can move along a surface direction of the substrate.