The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2016

Filed:

May. 07, 2013
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Tomonori Matsushita, Chino, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G01J 1/44 (2006.01); G01J 3/26 (2006.01); G01J 3/28 (2006.01); G01J 3/02 (2006.01); G01N 21/65 (2006.01); G01J 3/12 (2006.01);
U.S. Cl.
CPC ...
G02B 26/001 (2013.01); G01J 1/44 (2013.01); G01J 3/027 (2013.01); G01J 3/26 (2013.01); G01J 3/2823 (2013.01); G01J 2003/1247 (2013.01); G01N 21/658 (2013.01);
Abstract

A variable-wavelength interference filter includes: a first substrate; a second substrate facing the first substrate; a first reflection layer provided on a surface facing the second substrate, of the first substrate; a second reflection layer which is provided on a surface facing the first substrate, of the second substrate, and faces the first reflection layer via an inter-layer gap; and an electrostatic actuator which flexes the second substrate in a direction toward the first substrate and thus changes the inter-layer gap. The first reflection layer and the second reflection layer have a reflectance characteristic showing a higher reflectance to light with a second wavelength that is shorter than a first wavelength, than a reflectance to light with the first wavelength.


Find Patent Forward Citations

Loading…