The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2016

Filed:

Jun. 15, 2012
Applicants:

Takashige Yagi, Kagoshima, JP;

Hiroshi Makino, San Diego, CA (US);

Tetsuya Tojo, Kagoshima, JP;

Takahito Hirata, Kagoshima, JP;

Inventors:

Takashige Yagi, Kagoshima, JP;

Hiroshi Makino, San Diego, CA (US);

Tetsuya Tojo, Kagoshima, JP;

Takahito Hirata, Kagoshima, JP;

Assignee:

KYOCERA Corporation, Kyoto, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 17/26 (2012.01); H01J 61/28 (2006.01); H05H 1/24 (2006.01); H01T 23/00 (2006.01);
U.S. Cl.
CPC ...
H05H 1/2406 (2013.01); H01T 23/00 (2013.01); H05H 2001/2418 (2013.01); H05H 2001/2437 (2013.01);
Abstract

The plasma generator has the dielectric having the inner circumferential surface, and a pair of electrodes which are arranged separated from each other in the direction along the inner circumferential surface and are isolated from each other by the dielectric and which are capable of generating plasma on the inner circumferential surface by application of voltage. In the inner circumferential surface, at the positions between the pair of electrodes in a plan view, recessed portions causing electric field concentration are formed.


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