The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Sep. 22, 2014
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;
Inventor:
Takashi Miyake, Nagaokakyo, JP;
Assignee:
Murata Manufacturing Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01R 31/00 (2006.01); H03H 3/02 (2006.01); H04R 31/00 (2006.01); H01L 41/27 (2013.01); H01L 41/083 (2006.01); H03H 9/58 (2006.01); H03H 3/04 (2006.01);
U.S. Cl.
CPC ...
H04R 31/00 (2013.01); H01L 41/083 (2013.01); H01L 41/27 (2013.01); H03H 3/02 (2013.01); H03H 3/04 (2013.01); H03H 9/584 (2013.01); H03H 9/588 (2013.01); H03H 9/589 (2013.01); H03H 2003/023 (2013.01); H03H 2003/025 (2013.01); H03H 2003/0421 (2013.01); H03H 2003/0428 (2013.01); H03H 2003/0435 (2013.01); H03H 2003/0442 (2013.01); H04R 2231/00 (2013.01); Y10T 29/42 (2015.01); Y10T 29/49004 (2015.01); Y10T 29/49005 (2015.01); Y10T 29/49147 (2015.01); Y10T 29/49155 (2015.01);
Abstract
A method of manufacturing a stacked thin film piezoelectric filter includes the steps of forming a lower thin film piezoelectric resonator on a substrate, measuring and adjusting a frequency of the lower thin film piezoelectric resonator, forming an acoustic coupling layer on the lower thin film piezoelectric resonator where the frequency of the lower thin film piezoelectric resonator has been adjusted, forming an upper thin film piezoelectric resonator on the acoustic coupling layer, and measuring and adjusting a frequency of the stacked thin film piezoelectric filter.