The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Aug. 06, 2012
Applicants:
James P. Fazio, San Mateo, CA (US);
David K. Foote, San Jose, CA (US);
James D. Getty, Vacaville, CA (US);
Inventors:
James P. Fazio, San Mateo, CA (US);
David K. Foote, San Jose, CA (US);
James D. Getty, Vacaville, CA (US);
Assignee:
Nordson Corporation, Westlake, OH (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); C23C 16/458 (2013.01); C23C 16/4582 (2013.01); C23C 16/4583 (2013.01); C23C 16/4585 (2013.01); H01L 21/67745 (2013.01); H01L 21/67748 (2013.01); H01L 21/67751 (2013.01); H01L 21/68735 (2013.01); H01L 21/68771 (2013.01);
Abstract
Apparatus and methods for plasma processing workpieces of different diameters. The apparatus includes a lift plate having an outer perimeter, an opening inside of the outer perimeter, and a gap extending between the opening and the outer perimeter. The lift plate includes annular rims of different inner diameters and that are configured to respectively support the first and second workpieces.