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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9385017 B1

PDFFull Text
Date of Patent:
Jul. 05, 2016

Filed:

Aug. 06, 2012

Apparatus and methods for handling workpieces of different sizes

Applicants:

James P. Fazio, San Mateo, CA (US);

David K. Foote, San Jose, CA (US);

James D. Getty, Vacaville, CA (US);

Inventors:

James P. Fazio, San Mateo, CA (US);

David K. Foote, San Jose, CA (US);

James D. Getty, Vacaville, CA (US);

Assignee:

Nordson Corporation, Westlake, OH (US);

Attorney:

Baker & Hostetler LLP

Primary Examiner:

Jeffrie R Lund

Assistant Examiner:

Stanislav Antolin

Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); C23C 16/458 (2013.01); C23C 16/4582 (2013.01); C23C 16/4583 (2013.01); C23C 16/4585 (2013.01); H01L 21/67745 (2013.01); H01L 21/67748 (2013.01); H01L 21/67751 (2013.01); H01L 21/68735 (2013.01); H01L 21/68771 (2013.01);
Abstract

Apparatus and methods for plasma processing workpieces of different diameters. The apparatus includes a lift plate having an outer perimeter, an opening inside of the outer perimeter, and a gap extending between the opening and the outer perimeter. The lift plate includes annular rims of different inner diameters and that are configured to respectively support the first and second workpieces.

Find Patent Forward Citations

Fazio, James. (2016). Apparatus and methods for handling workpieces of different sizes (U.S. Patent No. 9385017). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9385017

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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