The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Aug. 01, 2014
Applicant:
Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-Do, KR;
Inventors:
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/66 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02236 (2013.01); H01L 21/02318 (2013.01); H01L 21/324 (2013.01);
Abstract
The inventive concepts provide methods of manufacturing a semiconductor device including a thermal treatment process. The method may include providing a substrate including a channel region of a transistor, forming an initial oxide layer on the channel region, and performing a thermal treatment process at least once before or after forming the initial oxide layer.