The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Jul. 01, 2014
Canon Kabushiki Kaisha, Tokyo, JP;
Hiroyuki Ishii, Shioya-gun, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
There is provided a method for generating a pattern. A pattern is generated by selecting a cell from a cell library including a plurality of cells, adding, to the interior of the selected cell, a second pattern different from a first pattern of the selected cell, performing a first optical proximity correction (OPC) onto the pattern of the selected cell including the first pattern and the second pattern, performing a second optical proximity correction onto a pattern of a plurality of cells in which the selected cell including first pattern and second pattern, which have been subjected to the first optical proximity correction, and another of the cells are proximately arranged and generating the pattern including the patterns of the plurality of cells which have been subjected to the second optical proximity correction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile