The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Dec. 26, 2013
Applicant:
First Solar, Inc., Perrysburg, OH (US);
Inventors:
Markus E. Beck, Scotts Valley, CA (US);
Ulrich A. Bonne, Sunnyvale, CA (US);
Raffi Garabedian, Los Altos, CA (US);
Erel Milshtein, Cupertino, CA (US);
Ming Lun Yu, Fremont, CA (US);
Assignee:
First Solar, Inc., Perrysburg, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); C23C 16/52 (2006.01); G01N 21/59 (2006.01); G01N 21/31 (2006.01); G01N 21/39 (2006.01);
U.S. Cl.
CPC ...
G01N 21/5907 (2013.01); C23C 14/544 (2013.01); G01N 21/3103 (2013.01); G01N 21/39 (2013.01); G01N 2021/399 (2013.01);
Abstract
A method of measuring vapor flux density including directing a light beam through a vapor flux to a pixel array sensor and using the pixel array sensor to measure attenuation of the light beam.