The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Nov. 10, 2015
Universität Stuttgart, Stuttgart, DE;
Klaus Koerner, Stuttgart, DE;
Arnulf Roeseler, Lindow, DE;
Daniel Claus, Stuttgart, DE;
Wolfgang Osten, Stuttgart, DE;
Universität Stuttgart, Stuttgart, DE;
Abstract
Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (), a detector (), a polarizer (), an analyzer (), and a measuring probe (). In one embodiment, the measuring probe may comprise an ATR prism () having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (), and at least one second surface having at least one reflective portion (RX).