The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Sep. 23, 2013
Applicant:
Ams International Ag, Rapperswil-Jona, CH;
Inventors:
Kim Phan Le, Eindhoven, NL;
Willem Frederik Adrianus Besling, Eindhoven, NL;
Assignee:
AMS INTERNATIONAL AG, Rapperswil-Jona, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 11/00 (2006.01); G01L 11/04 (2006.01); G01L 9/00 (2006.01); B81C 1/00 (2006.01); G01L 19/00 (2006.01);
U.S. Cl.
CPC ...
G01L 11/04 (2013.01); B81C 1/00158 (2013.01); G01L 9/0019 (2013.01); G01L 19/0092 (2013.01);
Abstract
A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.