The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
May. 02, 2012
Willem Frederik Adrianus Besling, Eindhoven, NL;
Klaus Reimann, Eindhoven, NL;
Peter Steeneken, Valkenswaard, NL;
Olaf Wunnicke, Eindhoven, NL;
Reinout Woltjer, Eindhoven, NL;
Willem Frederik Adrianus Besling, Eindhoven, NL;
Klaus Reimann, Eindhoven, NL;
Peter Steeneken, Valkenswaard, NL;
Olaf Wunnicke, Eindhoven, NL;
Reinout Woltjer, Eindhoven, NL;
AMS INTERNATIONAL AG, Rapperswil-Jona, CH;
Abstract
A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The capacitances associated with the inner electrode and the outer electrode are independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.