The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Apr. 16, 2010
Srinivas Yarlagadda, Baranzate, IT;
Natale Speciale, Paderno Dugnano, IT;
Franco Preti, Milan, IT;
Mario Preti, Legnano, IT;
Srinivas Yarlagadda, Baranzate, IT;
Natale Speciale, Paderno Dugnano, IT;
Franco Preti, Milan, IT;
Mario Preti, Legnano, IT;
LPE S.P.A., Baranzate, IT;
Abstract
The present invention relates to a reaction chamber of an epitaxial reactor that essentially consists of a quartz piece; the quartz piece comprises a quartz piece portion () having an internal cavity () defined by walls (A,B,C,D); the cavity () comprises a reaction and deposition zone () of the epitaxial reactor; the zone () is adapted to house a susceptor () to be heated therein; the reaction chamber also comprises a quartz component () arranged close to said walls (A,B,C,D) in such a manner as to form a counterwall and to be a wall of said zone ().