The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Jan. 19, 2010
James A. Belmont, Acton, MA (US);
James A. Belmont, Acton, MA (US);
Cabot Corporation, Boston, MA (US);
Abstract
The present invention relates to a composition comprising a silane modified metal oxide, wherein the silane modified metal oxide comprises a metal oxide having attached at least one silyl group, and wherein the silyl group comprises at least one —SOM, —OSOM, —SSOM, —NHSOM, —NR'SOM, —NR′A, or -QAgroup. R′, which can be the same or different, is a branched or unbranched, substituted or unsubstituted alkyl, alkenyl or alkynyl group or a substituted or unsubstituted aryl, heteroaryl, alkylaryl; or arylalkyl group, Mis a cationic counterion, and Ais a anionic counterion. The present invention further relates to the silane modified metal oxide used in the disclosed chemical mechanical polishing composition.