The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Jan. 26, 2015
Corning Incorporated, Corning, NY (US);
William R. Angell, IV, Painted Post, NY (US);
Sezhian Annamalai, Painted Post, NY (US);
Carlos Alberto Duran, Ottawa, CA;
John Edward Maxon, Canton, NY (US);
Corning Incorporated, Corning, NY (US);
Abstract
A glass article for use in Extreme Ultra-Violet Lithography (EUVL) is provided. The glass article includes a silica-titania glass having a compositional gradient through the glass article, the compositional gradient being defined by the functions:[TiO]=(()), and[SiO]=(100−{()}−δ())wherein [TiO] is the concentration of titania in wt. %, [SiO] is the concentration of silica in wt. %, c is the titania concentration in wt. % for a predetermined zero crossover temperature (T), f(x, y, z) is a function in three-dimensional space that defines the difference in average composition of a volume element centered at the coordinates (x, y, z) with respect to c, and δ(x, y, z) is a function in three-dimensional space that defines the sum of all other components of a volume element centered at the coordinates (x, y, z).