The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Nov. 14, 2011
Applicants:
Leif Steen Johansen, Kgs. Lyngby, DK;
Jan Tue Ravnkilde, Hedehusene, DK;
Pirmin Hermann Otto Rombach, Kongens Lyngby, DK;
Kurt Rasmussen, Herlev, DK;
Inventors:
Leif Steen Johansen, Kgs. Lyngby, DK;
Jan Tue Ravnkilde, Hedehusene, DK;
Pirmin Hermann Otto Rombach, Kongens Lyngby, DK;
Kurt Rasmussen, Herlev, DK;
Assignee:
EPCOS AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); H04R 1/22 (2006.01); H04R 19/00 (2006.01); H04R 19/04 (2006.01); H04R 31/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0086 (2013.01); B81C 1/00158 (2013.01); B81C 1/00698 (2013.01); H04R 1/222 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); H04R 31/00 (2013.01); H04R 31/006 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MEMS microphone has reduced parasitic capacitance. The microphone includes a trench electrically separating an acoustically active section of a backplate from an acoustically inactive section of the backplate.