The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Dec. 21, 2011
Applicants:
Oscar Hemberg, Kista, SE;
Tomi Tuohimaa, Kista, SE;
Björn Sundman, Kista, SE;
Inventors:
Assignee:
EXCILLUM AB, Kista, SE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 1/52 (2006.01); H01J 35/14 (2006.01); H01J 35/08 (2006.01);
U.S. Cl.
CPC ...
H05G 1/52 (2013.01); H01J 35/08 (2013.01); H01J 35/14 (2013.01); H01J 2235/082 (2013.01);
Abstract
A technique for indirectly measuring the degree of alignment of a beam in an electron-optical system including aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practiced in connection with an X-ray source which is operable to produce an X-ray target, further, a technique for determining and controlling a width of an electron-beam at its intersection point with the target.