The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2016

Filed:

Feb. 08, 2012
Applicants:

Pei Jia, Shenzhen, CN;

Liu-yang Yang, Shenzhen, CN;

Inventors:

Pei Jia, Shenzhen, CN;

Liu-yang Yang, Shenzhen, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 27/12 (2006.01); G02F 1/1368 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01); H01L 21/3213 (2006.01); H01L 29/45 (2006.01); H01L 29/49 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); H01L 21/465 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1288 (2013.01); G02F 1/1368 (2013.01); H01L 21/0262 (2013.01); H01L 21/02271 (2013.01); H01L 21/2855 (2013.01); H01L 21/32134 (2013.01); H01L 21/32139 (2013.01); H01L 21/465 (2013.01); H01L 27/124 (2013.01); H01L 27/1222 (2013.01); H01L 29/458 (2013.01); H01L 29/4908 (2013.01); H01L 29/66765 (2013.01); H01L 29/78669 (2013.01); H01L 29/78678 (2013.01);
Abstract

The present invention discloses a thin-film transistor array substrate and a manufacturing method thereof. The method includes steps of using a first multi-tone adjustment mask to form a gate electrode and a common electrode after depositing a first transparent conductive layer and a first metallic layer on a substrate; depositing a gate-insulating layer and a semiconductor layer and then using a first mask to retain a part of the semiconductor layer that is on a top of the gate electrode; depositing a second transparent conductive layer and a second metallic layer, and using a second multi-tone adjustment mask to form a source electrode, a drain electrode and a pixel electrode.


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