The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2016

Filed:

Apr. 21, 2011
Applicant:

Yihguei Wey, Vancouver, WA (US);

Inventor:

Yihguei Wey, Vancouver, WA (US);

Assignee:

WAFERTECH, LLC, Camas, WA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 21/28 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28114 (2013.01); H01L 21/28273 (2013.01); H01L 29/42376 (2013.01);
Abstract

Methods for forming floating gate transistors provide for using a self-aligned plug formed over a floating gate electrode without use of an additional photolithography operation. The plug is centrally disposed and is formed and aligned using spacers. The spacers are formed alongside edges of a patterned sacrificial, oxidation resistant layer that includes an opening that defines the floating gate region. The plug may be formed of a silicon material and which becomes oxidized along with the floating gate such that the plug eventually forms part of the floating gate electrode or the plug may be formed of a nitride or other oxidation resistant material to retard or prevent oxidation in the central portion of the floating gate in which the plug is aligned.


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