The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2016

Filed:

Dec. 19, 2013
Applicant:

Amazon Technologies, Inc., Seattle, WA (US);

Inventors:

Daniel Figura, Bratislava, SK;

Geert Martens, Heerweg, NL;

Romaric Mathieu Massard, Eindhoven, NL;

Bokke Johannes Feenstra, Nuenen, NL;

Assignee:

Amazon Technologies, Inc., Seattle, WA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G03F 7/00 (2006.01); H01L 21/28 (2006.01); H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
G02B 26/005 (2013.01); G03F 7/0005 (2013.01); H01L 21/28 (2013.01); H01L 21/31 (2013.01);
Abstract

A method of manufacturing a support plate including: providing a layer of a first material; providing, using an applied voltage, a layer of a second material on a surface of the layer of the first material; and exposing a part of the surface by removing a part of the layer of the second material.


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