The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Jun. 20, 2013
Applicant:
Mcube Inc., San Jose, CA (US);
Inventors:
Daniel N. Koury, Jr., Mesa, AZ (US);
Sudheer Sridharamurthy, Menlo Park, CA (US);
Assignee:
mCube Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G 7/00 (2006.01); G01R 3/00 (2006.01); G01P 15/125 (2006.01); B81B 3/00 (2006.01); G01C 19/5783 (2012.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01R 3/00 (2013.01); B81B 3/0072 (2013.01); G01C 19/5783 (2013.01); G01P 15/125 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/0307 (2013.01); G01P 2015/0857 (2013.01); Y10T 29/49007 (2015.01);
Abstract
An improved MEMS transducer apparatus and method is provided. The apparatus has a movable base structure including an outer surface region and at least one portion removed to form at least one inner surface region. At least one intermediate anchor structure is disposed within the inner surface region. The apparatus includes an intermediate spring structure operably coupled to the central anchor structure, and at least one portion of the inner surface region. A capacitor element is disposed within the inner surface region.