The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Apr. 09, 2013
Seiko Epson Corporation, Tokyo, JP;
Shinichi Kamisuki, Shiojiri, JP;
Seiko Epson Corporation, , JP;
Abstract
A physical quantity sensor includes: a first substrate including a first fixed electrode portion disposed on a first base surface and a first through-hole penetrating the front and rear of the substrate; a second substrate including a second fixed electrode portion disposed on a second base surface and a second through-hole penetrating the front and rear of the substrate, the second base surface being arranged to face the first base surface; and a movable body arranged between the first substrate and the second substrate with gaps and including a movable electrode portion facing the first fixed electrode portion and the second fixed electrode portion. In the first through-hole, a first through-electrode electrically connected with the first fixed electrode portion is disposed. In the second through-hole, a second through-electrode electrically connected with the second fixed electrode portion is disposed.