Leak testing methods and systems

Abstract

Leak rate testing is an engineering challenge where on the one hand, engineers must meet strict leak rate standards on a wide range of products and systems from semiconductor packages through medical product packaging to chemical storage vessels and liquid/gas handling systems. On the other hand, they have to make the leak testing process low cost and independent of operator whilst in many applications making the process automated and fast as this step may otherwise become a manufacturing bottleneck. Accordingly embodiments of the invention address manufacturing requirements by providing for high accuracy flow based leak testing of large volumes, providing adaptive techniques for use during testing, providing equivalent circuit modeling techniques allowing optimization and parameter extraction to be simulated prior to manufacturing commitment, and providing for the automatic tuning of setup parameters.