The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2016

Filed:

Jul. 13, 2012
Applicants:

Tomonori Matsushita, Chino, JP;

Yasushi Matsuno, Matsumoto, JP;

Inventors:

Tomonori Matsushita, Chino, JP;

Yasushi Matsuno, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/28 (2006.01); G01J 3/02 (2006.01); G02B 26/00 (2006.01); G01J 3/10 (2006.01); G01J 3/26 (2006.01); G01J 3/28 (2006.01); G01J 3/32 (2006.01); G01J 3/44 (2006.01); G01J 3/51 (2006.01);
U.S. Cl.
CPC ...
G01J 3/0291 (2013.01); G01J 3/027 (2013.01); G01J 3/0208 (2013.01); G01J 3/0264 (2013.01); G01J 3/10 (2013.01); G01J 3/26 (2013.01); G01J 3/2823 (2013.01); G01J 3/32 (2013.01); G01J 3/44 (2013.01); G01J 3/51 (2013.01); G02B 5/284 (2013.01); G02B 26/001 (2013.01);
Abstract

A filter includes a fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode provided on the surface of the fixed substrate facing the movable substrate, a second electrode provided on the movable substrate and opposed to the first electrode, bonding parts provided on opposing surfaces of the fixed and movable substrates and bonding the fixed substrate to the movable substrate, and a groove part provided in at least one of the opposing surfaces, and the gap is in communication with an exterior of the filter via the groove part.


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