The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2016

Filed:

Dec. 09, 2013
Applicants:

Nexcis, Rousset, FR;

Universite D'aix Marseille, Marseilles, FR;

Inventors:

Antonin Moreau, Rousset, FR;

Véronica Bermudez, Rousset, FR;

Ludovic Escoubas, Marseilles, FR;

Jean-Jacques Simon, Peypin, FR;

Assignees:

NEXCIS, Rousset, FR;

UNIVERSITE D'AIX-MARSEILLE, Marseilles, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/30 (2006.01); G01N 21/17 (2006.01);
U.S. Cl.
CPC ...
G01B 11/303 (2013.01); G01N 21/1717 (2013.01); G01N 2021/1725 (2013.01); G01N 2201/065 (2013.01);
Abstract

A photoreflectance device for characterizing a rough surface includes a pump beam emitter to emit a pump beam; a probe beam emitter to emit a probe beam; a detector to detect the probe beam reflected by the surface; an integrating sphere to collect the probe beam reflected by the surface, the integrating sphere including: a first output connected to the detector, and disposed so as to receive a majority of the probe beam reflected by the surface; a second output arranged so as to receive a majority of the pump beam reflected by the surface.


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